微电论坛（第594期）

题   目: Acoustic and Ultrasonic CMOS-compatible Micro-Devices: Design, Fabrication and Test
主讲人: Dr. Libor RUFER
主持人: Dr. Rongxiang WU
简 介:
    This talk will focus on Micro-Electro-Mechanical Systems (MEMS) based on bending deformations of thin diaphragms. These structures can find applications as acoustic devices covering audible and low ultrasonic frequencies. The talk will present approaches and design processes based on generic technologies readily available to small companies and academic institutions. We will show several examples of suspended diaphragms that can be part of transducers with piezoresistive, electrostatic, or electrodynamic transduction. We will also briefly present a testing technique that can be used for acoustic sensors calibration. This technique has a special interest for sensors with a frequency response exceeding the typical audible range.
    Libor Rufer received his Engineer degree from the Faculty of Electrical Engineering, and his Ph.D. in Acoustics from Czech Technical University, Prague, Czech Republic. He obtained his DEA diploma (Diplôme d'Etudes Approfondies, eq. Master) in Acoustics from Ecole Centrale, Lyon, France and the HDR diploma (Habilitation à Diriger des Recherches) in physics from Joseph Fourier University, Grenoble, France. Until 1993, he was with the Faculty of Electrical Engineering at the Czech Technical University, Prague. Since then, he is a Senior Researcher with the Joseph Fourier University, Grenoble, France. In 1998, he joined the TIMA Laboratory. Currently, he is member of its Micro- & Nano-Systems Group. His expertise is mainly in MEMS-based sensors and actuators, electro-acoustic and electro-mechanical transducers modeling, design, and applications of these devices in different fields as energy harvesting, acoustics & ultrasonics, biomed or RF.
Welcome to attend!